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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB31025619>
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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB31025619>
Functions:
Details
URL:

Collective HoldingsList 1-1 of about 1

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No. Library Location Location2 Volume Available Years/Months Accession status
0001 General B2 Stacks 9(4, 6), 10, 19(3-6) 1991-2001
No. 0001
Library General
Location B2 Stacks
Location2
Volume 9(4, 6), 10, 19(3-6)
Available Years/Months 1991-2001
Accession status
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Bibliography Details

title and statement of responsibility area Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
Volumes and Years of Serial Vol. 9, no. 1 (Jan./Feb. 1991)-
publication,distribution,etc.,area New York : American Institute of Physics , 1991-
physical description area v. : ill. ; 29 cm
NCID AA10804928
text language code English
frequency of publication code Bimonthly
ISSN 10711023
relation bibliography link 継続前誌 :Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society<SB31025618>
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